Electrically conducting probes with full tungsten cantilever and tip[EPFL]

mt7344

Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications
Abstract
& K! L  q8 j- U* f9 C. U; }  G; |! i) eWe have developed a new hybrid AFM probe combining an SU-8 polymer
body with a full tungsten cantilever having a nanometric tip. The fabrication
is based on surface micromachining a silicon wafer, where tungsten is sputter
/ T. U  J) h! A) O: g; Ddeposited in oxidation sharpened moulds to yield sharp tips with radius
8 ~; d- V8 m& H: H( jbelow 20 nm. The material properties of tungsten were measured, yielding a
hardness of 14 GPa, a specific resistivity of 14.8 μ
cm and Young’s
/ U- v$ Q* v* r3 I0 `7 O! Dmodulus of 380 GPa. Analyses of the probes show a mechanical quality
" d# `! z  D& F$ k; rfactor of 90 in air, and a low contact resistance of 25
on a gold sample is
measured. AFM imaging is demonstrated. As a step in the development of a
robust electrically conducting AFM probe, the results are very promising.
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$ `8 E2 Z$ [& q4 Z[ 本帖最後由 mt7344 於 2007-6-7 10:12 PM 編輯 ]