標題: Wafer Surface Profiler 晶圓表面形貌量測系統??? [打印本頁] 作者: SophieWeng@G 時間: 2018-9-11 06:13 PM 標題: Wafer Surface Profiler 晶圓表面形貌量測系統??? Wafer surface profiler is based on the measurement principle of optical deflectometry.
The fringe images on the wafer are reflected from a projection screen and captured by the CCD camera.
Wafer slope / profile / warpage / bow / stress can be determined by implementing the phase shift algorithm and analyzing the fringe deformation.