magnetic microsensor with electroplated Permalloy core[EPFL] - Chip123 科技應用創新平台

An orthogonal fluxgate-type magnetic microsensor with electroplated Permalloy core[EPFL]- `2 K: k/ ~/ F& d. u" R

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4 f8 g; t; [8 V+ L- p- \0 `In this paper, we present a new microfabricated orthogonal fluxgate sensor structure. The sensor consists of an electroplated copper excitation rod surrounded by an electroplated Permalloy layer and has planar pick-up coils for signal detection. The use of electroplating leads to a low-cost fabrication process and the use of planar pick-up coils provides easy integration with CMOS processes. The fabricated sensor has an excitation independent linear range of ±200T, a sensitivity of 510 V/mT, and an average power dissipation of 8.1mW for 100 mA-peak sinusoidal excitation current at 100 kHz frequency. The equivalent magnetic noise is 95 nT/√Hz at 1 Hz, and the RMS noise is 215 nT for 10 Hz bandwidth.
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