關於cell-based 流程的DRC問題

ywchywch

請問各位大大
' F# O/ m3 E' H1 O5 e) X( _1 ]+ F我用TSMC18的design kit作cell-based layout的練習，軟體是用encounter，大部分的步驟是依照CIC所提供的Lab去做，完成之後用我的GDS檔去做DRC，會出現下列的DRC ERROR，而且是M1~M5、via1~via5都會有這方面的error，因為error的數目頗大，不太可能用人工去debug，所以我想請問有經驗的大大們，能不能告訴我最大的問題點在哪裡？以及這些錯誤代表什麼？要如何debug比較適合？
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4 Z; c3 ]9 O7 ^  g先謝謝各位大大了!!感激不盡!!

$ f9 h$ J2 ^+ B( R1. M2.W.1 { @ M2 width < 0.28
$ b: W! l' l) o+ V/ J+ j7 i  INT M2 < 0.28 SINGULAR REGION ABUT < 90
}
& p4 `* m$ ~$ C1 k
2. M2.S.1 { @ M2 spacing < 0.28
* e  H: |% e: E& r: x; w  EXT M2 < 0.28 ABUT < 90 SINGULAR REGION
}

3. M2.S.2 { @ Wide M2 (>10um) min. to M2 < 0.6 um
  M2_S5 = SHRINK (SHRINK (SHRINK (SHRINK M2 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5
' G- k1 B& ^# q- P  U) D  M2_G5 = GROW (GROW (GROW (GROW M2_S5 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5
  M2_Wide = M2_G5 AND M2

  M2_Exp = SIZE M2_Wide BY 1 INSIDE OF M2 STEP 0.196
; D. e, X, X9 C7 }) B" D9 s, Q  M2_Branch = M2_Exp NOT M2_Wide
  M2_Branch_edge = M2_Branch COIN INSIDE EDGE M2
  M2_Check = M2 AND (SIZE M2_Exp BY 0.6)
  M2_Else = M2_Check NOT INTERACT M2_Exp
  M2_Extend = M2_Check NOT M2_Exp
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* W6 s8 i* T! a# \  EXT M2_Wide M2_Else < 0.6 ABUT >0 <89.5 REGION
) w, \$ g- u+ _  EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 OPPOSITE REGION
7 Y5 T3 d7 C+ W# `8 }  EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 CORNER REGION
/ ?( v3 d& a- M+ r% s/ F: n0 v2 h3 W  EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 PROJ==0 REGION
  A = EXT M2_Exp < 0.6 ABUT > 0 < 89.5 SPACE REGION
$ b% h: `5 m! @3 z5 a  A NOT INTERACT M2_Extend
}
. ]# {2 v2 S" i5 X4. M2.E.1 { @ Min extension of a M2 region beyond a VIA1 region is 0.01 um
   ENC VIA1 M2 < 0.01 ABUT<90 SINGULAR
   VIA1 NOT M2   
" B" w! c: C7 _2 I! P6 _}

/ T& f" L: G, D; u, p! T5. M2.E.2 { @ Min extension of M2 end-of-line region beyond VIA1 region is 0.06um
   X = ENC [VIA1] M2 < 0.06 ABUT < 90 OPPOSITE                // a narrow side
# K4 z3 T5 ~, S* o   INT X < 0.26 ABUT == 90 INTERSECTING ONLY       // adjacent narrow sides
}
7 A: v) D5 }- l4 A0 C3 V# n- V
1 |% E5 q+ }: B- P; O6 \) ]7 _0 f6. M2.A.1{ @ Min M2 area region < 0.202
9 z; {- m: B' s) P' P  AREA M2 < 0.202
}
9 m0 w; A4 @- {! K  @4 O0 m6 ~// Density check M2.R.1 included at the end of this file
// VIA2 checks
) k) I9 }2 j, k' u//=============
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7. VIA2.W.1 { @ VIA2 must be 0.26 x 0.26 um
  A = NOT RECTANGLE VIA2 == 0.26 BY == 0.26 ORTHOGONAL ONLY
  A OUTSIDE RNGX   // exclude from metal fuse protection ring area
3 ^2 c) a( `- ?# y& g4 u* ~}

8. VIA2.S.1 { @ VIA2 SPACING < 0.26
& l; H& Q  K# l, a. f  EXT VIA2 < 0.26 ABUT < 90 SINGULAR REGION
}

* S" B- y" r* z) }9. VIA2.E.1 { @ Min extension of a M2 region beyond a VIA2 region is 0.01 um
  ENC VIA2 M2 < 0.01 ABUT<90 SINGULAR
. Z. `& a9 \0 q  VIA2 NOT M2   
, F9 h. u$ h: D7 ~/ w5 N}
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10. VIA2.E.2 { @ Min extension of M2 end-of-line region beyond VIA2 region is 0.06 um
   X = ENC [VIA2] M2 < 0.06 ABUT < 90 OPPOSITE         // a narrow side
% [* i5 E5 W7 c$ h6 c5 d   INT X < 0.26  ABUT == 90 INTERSECTING ONLY     // adjacent narrow sides
2 F  K7 K# Q+ M7 {& e! u}

motofatfat

我猜你試用APR軟體RUN出來ㄉ
% T, @3 W4 X1 A應該是相同NET ㄉMetal space 和 via extension
) h$ c4 C) }6 H- w不夠的問題,通常會用 skill file 來修正

michael6172

我覺得你打電話去CIC問工程師會比較快吧 ...