|
請問各位大大/ B9 ^3 a f; f1 Y! D- _
我用TSMC18的design kit作cell-based layout的練習,軟體是用encounter,大部分的步驟是依照CIC所提供的Lab去做,完成之後用我的GDS檔去做DRC,會出現下列的DRC ERROR,而且是M1~M5、via1~via5都會有這方面的error,因為error的數目頗大,不太可能用人工去debug,所以我想請問有經驗的大大們,能不能告訴我最大的問題點在哪裡?以及這些錯誤代表什麼?要如何debug比較適合?
( d! { F: e9 z6 `7 \+ p/ m# D, m, L7 k, p" s7 b. l
先謝謝各位大大了!!感激不盡!!0 J$ z9 ~& M) f$ O3 Z
2 H) A# x: o# O S
1. M2.W.1 { @ M2 width < 0.28" Q7 W/ _& g# P/ f
INT M2 < 0.28 SINGULAR REGION ABUT < 901 J6 h0 z& C4 F: ~ }( Z5 d' i$ o# ~
}& \/ @) Y' G' D7 S6 O6 Z! t* j
2 f# t& T% B; J" w' p
2. M2.S.1 { @ M2 spacing < 0.28
. Q" C4 u7 V% J7 | EXT M2 < 0.28 ABUT < 90 SINGULAR REGION
4 g0 k& z# g0 d1 q& f}
% m4 T2 P8 {: R! ]- @% r
$ G# Y2 s- Z$ C' C7 a! p0 W$ m3. M2.S.2 { @ Wide M2 (>10um) min. to M2 < 0.6 um9 W9 W6 j! p" k9 [% k
M2_S5 = SHRINK (SHRINK (SHRINK (SHRINK M2 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5% J! o! `9 @' J" d8 \- c; O4 d, C
M2_G5 = GROW (GROW (GROW (GROW M2_S5 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5
4 E9 C$ k9 R% i M2_Wide = M2_G5 AND M2
& M$ \+ G/ F5 I0 j5 \
i0 s5 O7 S" z5 G M2_Exp = SIZE M2_Wide BY 1 INSIDE OF M2 STEP 0.1965 d+ p2 R% E0 q: w _8 T
M2_Branch = M2_Exp NOT M2_Wide5 J& c: {) |4 W' s$ ~* A% x/ G6 m
M2_Branch_edge = M2_Branch COIN INSIDE EDGE M2
5 D' t; L2 y( ~' M M2_Check = M2 AND (SIZE M2_Exp BY 0.6)
! A' U' \, O- Z+ Z7 X4 z M2_Else = M2_Check NOT INTERACT M2_Exp6 u' x" u3 h; o7 J
M2_Extend = M2_Check NOT M2_Exp ; [! |/ v9 g. D# q; K
6 V* `8 H3 E2 I. C4 j$ n EXT M2_Wide M2_Else < 0.6 ABUT >0 <89.5 REGION; H; I# K0 V+ g0 Q9 E1 u4 g+ {' g
EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 OPPOSITE REGION
# x. s: D! \# U! j, v8 ~ EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 CORNER REGION
/ R! p. N6 E. a* q; h. K2 X" U( ~* T EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 PROJ==0 REGION( A" B( S8 P2 m, R& @* x& L5 L
A = EXT M2_Exp < 0.6 ABUT > 0 < 89.5 SPACE REGION
* C+ w: D7 y. ^& p, h4 @. _ A NOT INTERACT M2_Extend3 E% E) F7 B' M7 N3 Z# _+ h
}9 ]1 l: K) A# L" O
4. M2.E.1 { @ Min extension of a M2 region beyond a VIA1 region is 0.01 um- i. N, E/ Q: X$ E
ENC VIA1 M2 < 0.01 ABUT<90 SINGULAR # ^. E- Z: ^4 p3 [
VIA1 NOT M2
h" X5 h$ G2 `, h( V* ^}9 N: o$ |; W' D/ n( S% E+ _% i$ U
% \! }2 Z. E9 L7 G5. M2.E.2 { @ Min extension of M2 end-of-line region beyond VIA1 region is 0.06um6 d/ f8 x# Q4 h& I& t( ^9 u/ \7 g$ Q
X = ENC [VIA1] M2 < 0.06 ABUT < 90 OPPOSITE // a narrow side
1 T" x5 g0 u/ n7 p# f" @ INT X < 0.26 ABUT == 90 INTERSECTING ONLY // adjacent narrow sides
" ?9 r, y( T) W' H}
& I. S \$ g/ \7 g' x
: W8 N4 G" o; ^" |7 R- @( |, u, v: A6. M2.A.1{ @ Min M2 area region < 0.2028 C& y" a6 l* h }1 Z
AREA M2 < 0.202
4 c7 F L9 i7 [' _$ r; P3 C} H4 O1 s, Y3 g1 F2 G7 g; Y
// Density check M2.R.1 included at the end of this file
7 e( R* u1 P; `// VIA2 checks( z) J7 X, I8 y6 ~
//=============+ }$ v/ B1 C" v# U4 u( ?8 o
3 H& e# c4 u7 Z% y7. VIA2.W.1 { @ VIA2 must be 0.26 x 0.26 um
7 G, l- W* A0 F, d4 b$ f' g5 k A = NOT RECTANGLE VIA2 == 0.26 BY == 0.26 ORTHOGONAL ONLY6 k# L. U0 W. ]+ U1 W2 M# [
A OUTSIDE RNGX // exclude from metal fuse protection ring area
) I% @7 h7 i% j5 {2 t+ @}
* J7 O# u Z) `- ^7 N
6 ?9 V0 ^ P9 {/ e8. VIA2.S.1 { @ VIA2 SPACING < 0.26
$ [& A6 R' b3 Y! z8 ` EXT VIA2 < 0.26 ABUT < 90 SINGULAR REGION ; s# R# ~* y3 f' P+ d7 t# Y
}
, }3 F2 U! G% S9 q% B8 W; X' C
# j( Y: x1 e5 ^# g) g9. VIA2.E.1 { @ Min extension of a M2 region beyond a VIA2 region is 0.01 um/ |' ` [) B) ]' B* K4 c
ENC VIA2 M2 < 0.01 ABUT<90 SINGULAR u6 ^1 K( X, ^ Y* a
VIA2 NOT M2 8 p3 e' c( r: ~5 i# [
}
% K2 V* N5 f# n, K% X
9 B6 i, T# M5 a10. VIA2.E.2 { @ Min extension of M2 end-of-line region beyond VIA2 region is 0.06 um
8 V7 C1 e- ^) A$ E) `$ y X = ENC [VIA2] M2 < 0.06 ABUT < 90 OPPOSITE // a narrow side% D. {' z/ ~; ?9 T2 c2 |! a& _ x p
INT X < 0.26 ABUT == 90 INTERSECTING ONLY // adjacent narrow sides
9 _) r( s0 q1 s& l3 C! l} |
|