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請問各位大大
$ k- g* z. S; {% e F2 u& k) V我用TSMC18的design kit作cell-based layout的練習,軟體是用encounter,大部分的步驟是依照CIC所提供的Lab去做,完成之後用我的GDS檔去做DRC,會出現下列的DRC ERROR,而且是M1~M5、via1~via5都會有這方面的error,因為error的數目頗大,不太可能用人工去debug,所以我想請問有經驗的大大們,能不能告訴我最大的問題點在哪裡?以及這些錯誤代表什麼?要如何debug比較適合?; M; L. L6 f6 x* c' I. t
! q5 D$ ^: {0 v& T0 k$ X' V/ X x) Y先謝謝各位大大了!!感激不盡!!
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1. M2.W.1 { @ M2 width < 0.28
$ j i0 @4 |0 F+ L; t5 a) h+ k INT M2 < 0.28 SINGULAR REGION ABUT < 90* ^! X% o* |( y/ N8 Y
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2. M2.S.1 { @ M2 spacing < 0.28. v4 D v4 b$ b! i1 P7 B) O1 H. M K
EXT M2 < 0.28 ABUT < 90 SINGULAR REGION) A% F' e6 n' R' j8 M
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" Y- f6 S. k9 T3 I" l3. M2.S.2 { @ Wide M2 (>10um) min. to M2 < 0.6 um
, P. x6 C8 q7 D* _+ l M2_S5 = SHRINK (SHRINK (SHRINK (SHRINK M2 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 58 R0 I$ ?6 S3 Q* j: [/ J* e
M2_G5 = GROW (GROW (GROW (GROW M2_S5 RIGHT BY 5) LEFT BY 5) TOP BY 5) BOTTOM BY 5
# r' C, t4 |4 d$ t/ m1 I- n. I& a M2_Wide = M2_G5 AND M2
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3 g( y& |5 Q9 C) t" x1 o9 `: y M2_Exp = SIZE M2_Wide BY 1 INSIDE OF M2 STEP 0.196 s; C* d5 g5 b% z
M2_Branch = M2_Exp NOT M2_Wide5 Q0 C9 W/ N9 w- v' c. u: m, ~
M2_Branch_edge = M2_Branch COIN INSIDE EDGE M2: o5 A( _% e8 A% b5 m
M2_Check = M2 AND (SIZE M2_Exp BY 0.6)
( t. s4 j9 M8 ]5 M6 |$ Q M2_Else = M2_Check NOT INTERACT M2_Exp: Y |1 k3 n+ J/ a7 t
M2_Extend = M2_Check NOT M2_Exp # u+ O) B0 ~0 G% S6 }1 }2 m
5 h5 s0 G6 C: s1 j4 |/ i; X3 H EXT M2_Wide M2_Else < 0.6 ABUT >0 <89.5 REGION
$ M' X: C/ [& I EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 OPPOSITE REGION
" u! _ l3 C1 |. P EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 CORNER REGION
& L4 ]4 u* A1 x- A$ |2 h EXT M2_Branch_edge M2_Else < 0.6 ABUT >0 <89.5 PROJ==0 REGION3 F0 s- o. O- T1 ~9 f; G5 S
A = EXT M2_Exp < 0.6 ABUT > 0 < 89.5 SPACE REGION3 k, n. @2 o8 M$ S% j
A NOT INTERACT M2_Extend
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: Y5 k" y7 |: y1 Q4. M2.E.1 { @ Min extension of a M2 region beyond a VIA1 region is 0.01 um' t. T- ^9 K& b% N
ENC VIA1 M2 < 0.01 ABUT<90 SINGULAR
9 l9 }% C. V/ ^4 r- | VIA1 NOT M2 $ a9 x9 b4 \+ H" s) u0 k* w
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5. M2.E.2 { @ Min extension of M2 end-of-line region beyond VIA1 region is 0.06um+ T6 y( D5 l; m4 w! T
X = ENC [VIA1] M2 < 0.06 ABUT < 90 OPPOSITE // a narrow side
2 a' J4 Y! u+ ~ INT X < 0.26 ABUT == 90 INTERSECTING ONLY // adjacent narrow sides
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6. M2.A.1{ @ Min M2 area region < 0.202% r, n5 L. m9 v' X: f
AREA M2 < 0.202# D! c* \; U! p
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// Density check M2.R.1 included at the end of this file
1 G9 U3 V5 M+ U4 F: w// VIA2 checks
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7. VIA2.W.1 { @ VIA2 must be 0.26 x 0.26 um
( b- R8 Z8 g5 x2 L A = NOT RECTANGLE VIA2 == 0.26 BY == 0.26 ORTHOGONAL ONLY+ t% r0 q! I& I+ D4 z
A OUTSIDE RNGX // exclude from metal fuse protection ring area
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2 ]5 a( i2 @3 i6 d8. VIA2.S.1 { @ VIA2 SPACING < 0.26
& ^' ?8 M8 n% y6 K3 n5 P EXT VIA2 < 0.26 ABUT < 90 SINGULAR REGION 0 |9 _5 {4 C$ X( l% F
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2 b4 a4 V& O6 K8 }& C# W7 Z! q9. VIA2.E.1 { @ Min extension of a M2 region beyond a VIA2 region is 0.01 um
9 x, c* i- b- e0 U1 | ENC VIA2 M2 < 0.01 ABUT<90 SINGULAR 6 @( k# e% |" k5 k
VIA2 NOT M2 & B! l. O+ E# h" h# Z
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10. VIA2.E.2 { @ Min extension of M2 end-of-line region beyond VIA2 region is 0.06 um
2 E; ?2 I% x4 k0 m' c X = ENC [VIA2] M2 < 0.06 ABUT < 90 OPPOSITE // a narrow side
: K! V; e! a0 J8 ]4 u3 H/ E' N INT X < 0.26 ABUT == 90 INTERSECTING ONLY // adjacent narrow sides7 J* `& s/ [0 X3 ~
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