|
An orthogonal fluxgate-type magnetic microsensor with electroplated Permalloy core[EPFL]! I# a: I) y/ N- K
7 l; N8 c t; Z) s0 @* y3 a; ~
Abstract# K, F9 g" E& k N. T a5 K
In this paper, we present a new microfabricated orthogonal fluxgate sensor structure. The sensor consists of an electroplated copper excitation rod surrounded by an electroplated Permalloy layer and has planar pick-up coils for signal detection. The use of electroplating leads to a low-cost fabrication process and the use of planar pick-up coils provides easy integration with CMOS processes. The fabricated sensor has an excitation independent linear range of ±200T, a sensitivity of 510 V/mT, and an average power dissipation of 8.1mW for 100 mA-peak sinusoidal excitation current at 100 kHz frequency. The equivalent magnetic noise is 95 nT/√Hz at 1 Hz, and the RMS noise is 215 nT for 10 Hz bandwidth.
0 a9 p+ U# I" F8 C; X% A" ~. M
, R- E# x& t' O; c4 Y+ g( h% i0 Y3 q+ v
網路上抓的! 若有版權問題 請版主刪除!
, j5 _; S n3 O: t' dPDF 7 PAGES file! |
本帖子中包含更多資源
您需要 登錄 才可以下載或查看,沒有帳號?申請會員
x
|