magnetic microsensor with electroplated Permalloy core[EPFL]

mt7344 · 發表於 2007-5-30 23:31:25

An orthogonal fluxgate-type magnetic microsensor with electroplated Permalloy core[EPFL]1 V6 a+ i: R+ A; R* A  `& N' v
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Abstract
. G: q  ~& \1 K5 _! NIn this paper, we present a new microfabricated orthogonal fluxgate sensor structure. The sensor consists of an electroplated copper excitation rod surrounded by an electroplated Permalloy layer and has planar pick-up coils for signal detection. The use of electroplating leads to a low-cost fabrication process and the use of planar pick-up coils provides easy integration with CMOS processes. The fabricated sensor has an excitation independent linear range of ±200T, a sensitivity of 510 V/mT, and an average power dissipation of 8.1mW for 100 mA-peak sinusoidal excitation current at 100 kHz frequency. The equivalent magnetic noise is 95 nT/√Hz at 1 Hz, and the RMS noise is 215 nT for 10 Hz bandwidth.7 q# M# Y" e$ I7 H' V/ D
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magnetic microsensor with electroplated Permalloy core[EPFL]

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