An Orthogonal Fluxgate-Type Magnetic Microsensor[EPFL]

mt7344

ABSTRACT
& C. p. `' r0 X: W& l3 P$ I8 H3 uIn this paper, we present a new microfabricated
orthogonal fluxgate sensor structure. The sensor
consists of an electroplated copper excitation rod
surrounded by an electroplated permalloy layer and has
1 X5 N& c& `8 a; s$ A" r; qplanar pick-up coils for signal detection. The use of
. l6 H+ ~% a* S$ ^" Y% ielectroplating leads to a low-cost fabrication process
5 Y, D2 K& a# N8 }% Iand the use of planar pick-up coils provides easy
integration with CMOS processes. The fabricated
sensor has an excitation independent linear range of
! G. e  a* R& Y  U* N±100 μT, a sensitivity of 280 μV/mT, and an average
power dissipation of 0.8 mW for 30 mA-peak
sinusoidal excitation current at 100 kHz frequency.
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3 V6 I0 @# o6 }9 H4 f" W* T" {網路上抓的 paper, 希望對大家有幫助!!
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