Electrically conducting probes with full tungsten cantilever and tip[EPFL]

mt7344

Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications
4 h4 {. w  Z! n5 MAbstract
2 @' v0 f1 S2 d* k1 OWe have developed a new hybrid AFM probe combining an SU-8 polymer
! j! J2 ^9 [" w) bbody with a full tungsten cantilever having a nanometric tip. The fabrication
; ^+ u* e* x8 s; b8 s4 vis based on surface micromachining a silicon wafer, where tungsten is sputter
deposited in oxidation sharpened moulds to yield sharp tips with radius
below 20 nm. The material properties of tungsten were measured, yielding a
hardness of 14 GPa, a specific resistivity of 14.8 μ
cm and Young’s
modulus of 380 GPa. Analyses of the probes show a mechanical quality
factor of 90 in air, and a low contact resistance of 25
on a gold sample is
measured. AFM imaging is demonstrated. As a step in the development of a
robust electrically conducting AFM probe, the results are very promising.


+ a* _3 U5 p. Z* S' U% U* Y
網路上抓的 paper, 希望對大家有幫助!!
權限10 & RDB=0
* x' v" p5 Z* J& e& D5 a$ S
4 R( c9 z. N4 F- l

遊客，如果您要查看本帖隱藏內容請回復

% H: W; [. O& w' J( e1 m) c
5 u& y5 k8 j' W6 [5 v- `( C
[ 本帖最後由 mt7344 於 2007-6-7 10:12 PM 編輯 ]