Electrically conducting probes with full tungsten cantilever and tip[EPFL]

mt7344

Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications
Abstract
1 f- {% n. A, E) m$ oWe have developed a new hybrid AFM probe combining an SU-8 polymer
body with a full tungsten cantilever having a nanometric tip. The fabrication
is based on surface micromachining a silicon wafer, where tungsten is sputter
7 P: `! D7 I8 [2 z& R9 H/ adeposited in oxidation sharpened moulds to yield sharp tips with radius
below 20 nm. The material properties of tungsten were measured, yielding a
hardness of 14 GPa, a specific resistivity of 14.8 μ
cm and Young’s
6 B' N$ P& T3 R9 Bmodulus of 380 GPa. Analyses of the probes show a mechanical quality
factor of 90 in air, and a low contact resistance of 25
on a gold sample is
measured. AFM imaging is demonstrated. As a step in the development of a
8 s7 I' e1 t, arobust electrically conducting AFM probe, the results are very promising.
$ s& E) ]6 a, a& v+ G

3 c+ H" P! o0 F, t% X$ Q/ v
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3 `: [6 J9 @6 r" U9 k' s[ 本帖最後由 mt7344 於 2007-6-7 10:12 PM 編輯 ]