CMOS magnetic sensors with integrated ferromagnetic parts[EPFL]

mt7344

Abstract
The paper deals with Hall and flux-gate magnetic field sensors consisting of integrated combination of CMOS ASICs and planar ferromagnetic
components. Ferromagnetic parts are made of a soft amorphous alloy, integrated at the CMOS wafer in a post-processing production phase.
" }$ t1 p$ O/ {5 m1 [1 E& S+ PWhen the sensors are exposed to an in-plane magnetic field, under the peripheries of ferromagnetic parts appears a strong magnetic induction
perpendicular to the wafer surface. This perpendicular field is sensed either by Hall plates or planar coils. In the case of Hall magnetic sensors,
such ferromagnetic parts give a magnetic gain of 2–10. Compared to conventional integrated Hall magnetic sensors, the new sensors have up to
10 times higher magnetic resolution and they respond to a magnetic field parallel with the surface of the chip. They are used as current sensors or
angular position sensors. In the case of flux-gate sensors, both the saturation-forcing coil and the pick-up coils are realized as planar coils, using
1 E5 N% [2 z6 s, V/ m) ymetallization layers that exist in the CMOS process. The integrated flux-gate technology is illustrated by a low-power two-axis magnetic field
sensor suitable for a portable electronic compass.

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. s' U5 ?5 l$ F, N0 {5 L網路上抓的 paper, 希望對大家有幫助!!
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imakeall

感謝分享了
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j2iwin

感謝大大的無私的分享感謝你
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pj4800cdr00g

我來回帖了~~~請板大看招~~!

tzuenhau

感謝分享囉 隨然都是英文看起來很像看不懂 但還是謝謝你囉  謝謝囉

chirong17

還蠻有興趣的..下在下來看看吧..希望對自己的研究有幫助...謝謝囉