CMOS magnetic sensors with integrated ferromagnetic parts[EPFL]

mt7344

Abstract
The paper deals with Hall and flux-gate magnetic field sensors consisting of integrated combination of CMOS ASICs and planar ferromagnetic
- r+ U0 Y* i( T2 y! ^components. Ferromagnetic parts are made of a soft amorphous alloy, integrated at the CMOS wafer in a post-processing production phase.
When the sensors are exposed to an in-plane magnetic field, under the peripheries of ferromagnetic parts appears a strong magnetic induction
  w0 e9 i: A* L' A2 Y% M/ g( \perpendicular to the wafer surface. This perpendicular field is sensed either by Hall plates or planar coils. In the case of Hall magnetic sensors,
such ferromagnetic parts give a magnetic gain of 2–10. Compared to conventional integrated Hall magnetic sensors, the new sensors have up to
10 times higher magnetic resolution and they respond to a magnetic field parallel with the surface of the chip. They are used as current sensors or
angular position sensors. In the case of flux-gate sensors, both the saturation-forcing coil and the pick-up coils are realized as planar coils, using
" K( m+ u, y# \/ K, c2 tmetallization layers that exist in the CMOS process. The integrated flux-gate technology is illustrated by a low-power two-axis magnetic field
; s6 Q8 i8 L' R& esensor suitable for a portable electronic compass.
9 K$ m/ u3 J1 N9 T) v

網路上抓的 paper, 希望對大家有幫助!!
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imakeall

感謝分享了
此文件很有益處
. x5 S- Z* |, N, @Thanks

j2iwin

感謝大大的無私的分享感謝你
  e% T/ o6 ]: [, _讓我們學習到更多的知識

pj4800cdr00g

我來回帖了~~~請板大看招~~!

tzuenhau

感謝分享囉 隨然都是英文看起來很像看不懂 但還是謝謝你囉  謝謝囉

chirong17

還蠻有興趣的..下在下來看看吧..希望對自己的研究有幫助...謝謝囉